Study on surface passivation by YZO/AlOx stacking double layer for crystalline Si solar cells

T. Katsumata, N. Ikeno, S. Satoh, H. Yoshida, K. Arafune, T. Chikyow, Atusi Ogura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We investigated stacking double layer structure, the Y2O3-ZrO2 composite film (YZO) on AlOx, for the field effect passivation with high negative fixed charge densities on p-type Si. The composition spread YZO films were deposited at room temperature by using combinatorial sputtering technique. The fixed charge densities were extracted from the flat band voltage shift in the capacitance-voltage characteristics. The as-deposited ZrO2 film incorporated with 15% Y2O3 stacking on the ALD AlOx structure showed the highest negative fixed charge of -1.9 × 1012 cm-2. The field effect passivation can be controlled by the negative fixed charges in the YZO film depending on the composition and dipole uniformly formed at AlOx/Si interface. After annealing in the oxygen atmosphere, passivation properties deteriorated caused by the Al diffusion at the YZO/AlOx interface.

Original languageEnglish
Title of host publication2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages601-604
Number of pages4
ISBN (Electronic)9781479943982
DOIs
Publication statusPublished - 15 Oct 2014
Event40th IEEE Photovoltaic Specialist Conference, PVSC 2014 - Denver, United States
Duration: 8 Jun 201413 Jun 2014

Publication series

Name2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014

Conference

Conference40th IEEE Photovoltaic Specialist Conference, PVSC 2014
CountryUnited States
CityDenver
Period8/06/1413/06/14

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Keywords

  • capacitance-voltage characteristics
  • combinatorial technique
  • field effect passivation
  • negative fixed charge density
  • stacking double layer

Cite this

Katsumata, T., Ikeno, N., Satoh, S., Yoshida, H., Arafune, K., Chikyow, T., & Ogura, A. (2014). Study on surface passivation by YZO/AlOx stacking double layer for crystalline Si solar cells. In 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014 (pp. 601-604). [6924993] (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2014.6924993