Prototype of the multi-pixel X-ray microcalorimeter

Hiroyuki Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N. Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. FujimoriY. Ishisaki, U. Morita, T. Koga, K. Sato, T. Ohashi, Y. Kuroda, M. Onishi, K. Otake

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

An X-ray microcalorimeter is a noble X-ray spectrometer that can be used for photon counting with a high energy resolution comparable to the gratings. A 2x2 X-ray microcalorimeter array was fabricated and tested. Due to the purpose of imaging applications, we have applied so-called 'mushroom-shaped' X-ray micro absorber fabricated using two-step exposure and electrodeposition process. The energy resolution of 180 eV(FWHM) at 5.9 keV was obtained with the first prototype of the X-ray microcalorimeter array using Sn micro absorber. By using Bi absorber, it is estimated that the energy resolution can be improved up to 4.5 eV.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1108-1111
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 1 Jan 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 8 Jun 200312 Jun 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period8/06/0312/06/03

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Keywords

  • Bismuth
  • Energy resolution
  • Gratings
  • High-resolution imaging
  • Optical imaging
  • Prototypes
  • Spectroscopy
  • Testing
  • Tin
  • X-ray imaging

Cite this

Kudo, H., Nakamura, T., Arakawa, T., Ohtsuka, S., Izumi, T., Shoji, S., ... Otake, K. (2003). Prototype of the multi-pixel X-ray microcalorimeter. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1108-1111). [1216963] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216963