Development of metal substrate MEMS sensors for local multipoint heat flux measurement in engines

Kazuhito Dejima, Osamu Nakabeppu, Yuto Nakamura, Tomohiro Tsuchiya, Keisuke Nagasaka

Research output: Contribution to journalConference articlepeer-review

Abstract

Three thin film resistance sensors were fabricated on a metal substrate with MEMS technologies for heat flux measurement on an engine inner wall. To investigate turbulent heat transfer in the engine, the heat flux sensor is required to have multi measurement points on sub-millimeter scale. In addition, the measurement noise has to be low enough to evaluate the instantaneous heat flux, and the sensor must have high durability due to the harsh environment in the engine. Through measurement tests of the three-point sensor and prototypes, it was revealed the MEMS heat flux sensor satisfied the required performances. From this result, it can be expected that the MEMS heat flux sensor becomes a powerful tool for engine heat transfer investigation. The turbulent heat transfer in the engine is characterized from instantaneous three-point heat flux data measured with the MEMS sensor.

Original languageEnglish
Pages (from-to)8721-8726
Number of pages6
JournalInternational Heat Transfer Conference
Volume2018-August
DOIs
Publication statusPublished - 2018
Event16th International Heat Transfer Conference, IHTC 2018 - Beijing, China
Duration: 10 Aug 201815 Aug 2018

Keywords

  • Combustion
  • Heat flux measurement
  • Internal combustion engine
  • MEMS

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