Bipolar Transistor Test Structures for Extracting Minority Carrier Lifetime in IGBTs

Kiyoshi Takeuchi, Munetoshi Fukui, Takuya Saraya, Kazuo Itou, Toshihiko Takakura, Shinichi Suzuki, Yohichiroh Numasawa, Naoyuki Shigyo, Kuniyuki Kakushima, Takuya Hoshii, Kazuyoshi Furukawa, Masahiro Watanabe, Hitoshi Wakabayashi, Kazuo Tsutsui, Hiroshi Iwai, Atsushi Ogura, Wataru Saito, Shin Ichi Nishizawa, Masanori Tsukuda, Ichiro OmuraHiromichi Ohashi, Toshiro Hiramoto

Research output: Contribution to journalArticle

Abstract

Vertical PNP bipolar transistor test structures were fabricated and measured, attempting to electrically obtain information on carrier lifetime in the voltage-supporting base region of Insulated Gate Bipolar Transistors (IGBTs). Owing to the structural similarity, the test structures and functional IGBTs can be integrated on the same wafers, making it possible to directly correlate lifetime data and IGBT characteristics. To solve a problem of leaky backside PN junction, common base current gain of the test devices was measured without applying a reverse bias between the collector and base terminals, which suppressed the leakage to an acceptable level. A simple analytical formula to convert the current gain to hole lifetime in the N-type base region was proposed and used, that takes into account the existence of a commonly used N-buffer layer adjacent to the backside P-collector layer. The validity of the formula was confirmed using TCAD simulations. This method was applied to IGBT wafers with two different wafer thicknesses (i.e., base lengths): 120~{{mu }}text{m} and 360~{{mu }}text{m}. Consistent lifetime values extracted in spite of the largely different thicknesses supports the validity of the proposed lifetime estimation method.

Original languageEnglish
Article number8986674
Pages (from-to)159-165
Number of pages7
JournalIEEE Transactions on Semiconductor Manufacturing
Volume33
Issue number2
DOIs
Publication statusPublished - May 2020

Keywords

  • IGBT
  • bipolar transistor
  • carrier lifetime
  • test structure

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    Takeuchi, K., Fukui, M., Saraya, T., Itou, K., Takakura, T., Suzuki, S., Numasawa, Y., Shigyo, N., Kakushima, K., Hoshii, T., Furukawa, K., Watanabe, M., Wakabayashi, H., Tsutsui, K., Iwai, H., Ogura, A., Saito, W., Nishizawa, S. I., Tsukuda, M., ... Hiramoto, T. (2020). Bipolar Transistor Test Structures for Extracting Minority Carrier Lifetime in IGBTs. IEEE Transactions on Semiconductor Manufacturing, 33(2), 159-165. [8986674]. https://doi.org/10.1109/TSM.2020.2972369