A solution flow system for hydrothermal-electrochemical growth of multilayered thin films

Wojciech L. Suchanek, Tomoaki Watanabe, Bungo Sakurai, Naoki Kumagai, Masahiro Yoshimura

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

A solution flow system equipment for hydrothermal-electrochemical synthesis of advanced thin films has been designed, constructed, and successfully tested. The synthesis using recyclable (aqueous) solutions as precursors can be carried out up to temperature of 200°C and pressure of 50 kg cm-2 utilizing electrochemical activation of the nucleation and growth processes. Any clear solution can be used as a precursor; there are almost no limitations of the substrates used. The equipment is easy to use, versatile, and inexpensive. Applicability of the solution flow system for synthesis of advanced materials has been demonstrated using single-layer and multilayer BaTiO3-SrTiO3 thin films. Our equipment allows control of the microstructure of the films in a nanometric scale by changing the preparation conditions, for example the growth rate can be increased by increasing the flow rate. In addition, the multilayered films can be prepared in only one experiment just by changing the kind of flowing solution. The technique using the solution flow under the hydrothermal-electrochemical conditions is an important step in integration of the solution processing with the advanced device technology.

Original languageEnglish
Pages (from-to)2432-2437
Number of pages6
JournalReview of Scientific Instruments
Volume70
Issue number5
DOIs
Publication statusPublished - 1 Jan 1999

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